Senior Process Engineer
Company websiteaxcelis.com (Axcelis, opens in new tab)
Base salary $117,768 to $176,652
Employer-published annual base salary, USD. Advertised base range in Beverly, MA
You apply on the employer's own site. Six Figure Work does not handle applications.
- LocationBeverly, MA
- WorkplaceWorkplace not stated
- Status at last checkSource accepting applications when checked
- Last checked (2 h ago) · observed since
About this job
JOB DESCRIPTION
I. Determine Operational Parameters for Tool
Determine parametric operational space for equipment as defined by technical need, customer requirements and marketing input. Identify areas requiring additional data, characterization, and documentation and initiate plans to provide that information.
Generate a formal characterization plan for the tool set. Include all areas of operation affecting final tool performance, including source, AMU magnet, etc.
Generate a data package consisting of a snapshot of the current operational window of the tool. This package should be based on current machine specifications. This package will be available to marketing, sales, and internal customers. This package should be regularly updated and maintained in an organized, accessible format. Initiate plan to collect relevant information and follow through with reports, technical notes, and applications "Best Methods" Documents.
Continuously monitor new hardware and procedures introduced on tool set. Assist in definition, characterization and documentation as required.
II. Interact with customer installed-base
Collect and maintain information on existing customers. Include information on processes, technology node, beta-site status, production volume, etc.
Collect information related to SPC type performance of the tool, including information on repeatability, particles, manufacturing up-time, and other relevant metrics. Document for internal distribution.
Interact with customers to identify areas of performance requiring further characterization, including new processes and applications.
III. Interaction with Equipment Demonstration Lab
Work with Systems Engineers and Equipment Technologists in performing customer related tool demonstrations. This includes reviewing the initial request for technical content and requirements, determining feasibility, and reviewing requirements with the customer as required. Assist in running wafers, setting up recipes, and reviewing system qualification prior to running customer wafers. Ensure proper tool performance to meet customer requirements.
Write and distribute report on the demonstration to the customer. Follow up with the customer on tool performance, including yield, charging, or other pertinent information. Distribute in-house accordingly.
IV. Work with Marketing and Systems Engineers to meet Operating Specifications
Provide feedback to marketing and engineering on tool performance as additional understanding and characterization is available. Assist in determining operational specifications for new processes and/or hardware. Document and maintain as required.
Provide competitive differentiating data as required by marketing. Collect and maintain information on competitor tools and processes. Identify strengths and weaknesses of tool and assist in determining an action plan to strengthen overall product position.
V. Identify New Applications for Tools
Identify new applications as determined through interactions with customers, marketing, and research in literature. Initiate plans and joint development programs with customers to determine tool performance for these applications (example: Deep UV resists, Advanced HALO implants)
Help communicate and coordinate efforts within engineering for required tool upgrades, including hardware and software. Disseminate information to all other departments.
EQUAL OPPORTUNITY STATEMENT
It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law. Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
U.S. BASE SALARY RANGE
$117,767.73 - $176,651.59This base salary range reflects the typical compensation for this role across U.S. locations.
Our salary ranges are determined by role and level; individual pay is determined based on
multiple factors, including job-related skills, experience, relevant education or training, work
location, and internal equity. The range provides the opportunity for growth and progression as
you develop within the role.
Base pay is one part of our U.S. total compensation package which includes eligibility in the
Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular
employees working 20+ hours a week).
Source: Axcelis on Workday · View original posting (opens in new tab)
Pay in context
This role's base floor ($117,768) is above 30% of the 225 Engineering (non-software) roles in Massachusetts listed on this site. Their median floor is $132,000; the middle half runs from $117,000 to $147,000.
Only jobs on this site count, and each one publishes a base salary of $100,000 or more, so this compares six-figure jobs with each other, not with the whole market. Computed Nov 7, 2026.
This listingSenior Process Engineer$117,768 to $176,652
Eng Test Senior$116,332 to $174,497
Full Stack Software Engineer$122,133 to $183,200
Sr. Reliability Quality Engineer$122,290 to $183,435
Product Safety and Compliance Engineer$122,290 to $183,435
Senior Technical Project Manager (Electrical Engineering Focus)$124,050 to $186,075
Senior Advanced Control & Automation Engineer- Semiconductor Equipment$124,050 to $186,075
Chart as a table
| Role | Published base |
|---|---|
| Senior Process Engineer (this listing) | $117,768 - $176,652 |
| Eng Test Senior | $116,332 - $174,497 |
| Full Stack Software Engineer | $122,133 - $183,200 |
| Sr. Reliability Quality Engineer | $122,290 - $183,435 |
| Product Safety and Compliance Engineer | $122,290 - $183,435 |
| Senior Technical Project Manager (Electrical Engineering Focus) | $124,050 - $186,075 |
| Senior Advanced Control & Automation Engineer- Semiconductor Equipment | $124,050 - $186,075 |
Observed changes
- First observed on the employer's board
- Began meeting the published-salary criteria
- Observed since
- Employer-stated posting date
- 2026-06-04
Where this pay comes from
Location as the employer wrote it: Beverly, MA
$117,767.73 - $176,651.59
- Method
- Employer text, read with fixed rules and re-verified
- Checked
- Rule set
- us-base-v2
The pay passage appears in the employer's own job text. Fixed, deterministic rules located it, and the passage below was checked against the stored copy of the posting.
What we verified
- The pay figures come from the employer's own listing, quoted exactly above.
- The pay is an annual base salary in US dollars with a minimum of at least $100,000.
- The role was publicly listed on the employer's job board when last checked.
We do not verify what the employer will actually offer, whether the employer is still recruiting for the role, or anything beyond what the employer published. Full methodology.
