Six Figure Work

Senior Software Systems Engineer

Axcelis

Company websiteaxcelis.com (Axcelis, opens in new tab)

Base salary $124,924  to $187,387

Employer-published annual base salary, USD. Advertised base range in Beverly, MA

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  • LocationBeverly, MA
  • WorkplaceWorkplace not stated
  • Status at last checkSource accepting applications when checked
  • Last checked (1 h ago) · observed since

About this job

JOB DESCRIPTION

Job Description

Senior Software Systems Engineer  

Want to discover just how far your intellectual curiosity can take you? You’re in the right place. For more than four decades, Axcelis Technologies has been at the forefront of innovation in semiconductor manufacturing technology. Chipmakers around the globe rely on our tools and process expertise to deliver the semiconductors that power modern life from smartphones and computers to cameras and cars. We have become a technology leader by providing the innovation necessary for business to thrive, quality of life to advance, and the environment to flourish—enabling a truly sustainable future.

Our influence is global, with more than 30 offices worldwide, an installed base of thousands worldwide and a customer list that includes the world’s largest semiconductor manufacturers. Our team is expanding, and we are currently hiring a Senior Machine Control Software Systems Engineer for our corporate office in Beverly, MA.

Position Background:

This machine control software engineer will write software to control wafer handling functions for Axcelis ion implanter systems.  Ion implanter systems are large complex capital equipment systems used by semiconductor manufacturers.  These fully automated systems run 24/7 and are used in the manufacture of semiconductor integrated circuits.  These systems implant ions into silicon wafers by directing an ion beam onto the wafers.  Wafer processing rates exceed 500 wafers per hour and must be exceedingly reliable with maximum uptime and an absolute minimum of failures.

All wafer handling and processing is done in the end station portion of the system. The end station consists of multiple cassettes for bringing wafer to and from the system, a process chamber in a high vacuum environment, multiple robots in the normal atmosphere environment, multiple robots in the vacuum environment, vacuum load locks, aligners, and multiple additional sensors and actuators.  Some robots are purchased commercial robots and others are completely custom.  Wafer handling control is done using Delta Tau PMAC controllers and commercial servo amplifiers.

Responsibilities:

  • Design, implement, and test machine control software to control new wafer handling features and to make changes to existing wafer handling control methods.
  • Learn and fully understand present wafer handling hardware and robot operations.
  • Learn and fully understand new wafer handling hardware in order to write software to control the hardware.
  • Modify machine control software to add new functionality, to meet new requirements, improve present operation, and to optimize present operation.
  • Operate the wafer handling portion of an ion implantation system in order to develop and test new software and hardware controls.
  • Writes subsystem verification and test routines.
  • Work closely with mechanical, hardware, validation/reliability and manufacturing engineering disciplines.

Basic Qualifications:

  • A minimum of a BS in Electrical/Mechanical Engineering, Computer Science or Computer Engineering. And experience 5+ years, MS prefer.
  • Will have written software to control electrical/mechanical systems & have excellent software skills.
  • Knowledgeable in computer networking architectures, topologies and hardware and communication protocols such as TCP/IP, RS232, RS485, & USB.
  • Must be able to handle multiple tasks, have excellent attention to detail, and be willing and able to learn new technologies quickly.
  • Have a good understanding of electrical/mechanical systems and the ability to understand how things work and be a hands-on person comfortable working in the lab on equipment
  • Good verbal and written communications skills.
  • Semiconductor industry or similar experience is plus. Ion implant is huge plus.
  • Experience with Delta Tau PMAC controllers or other motion controller is plus.
  • Training and/or experience with robots, motors, actuators, and servo systems is a plus.
  • Knowledge/experience with implant is a plus.
  • Knowledge/experience with real time control is a plus.
  • Knowledge/experience with hardware (like FPGA, PCB … etc.) is a plus.
  • Experience on Embedded hardware/software architecture is a plus.

EQUAL OPPORTUNITY STATEMENT


It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law.  Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
 

U.S. BASE SALARY RANGE

$124,924.40 - $187,386.60

This base salary range reflects the typical compensation for this role across U.S. locations.

Our salary ranges are determined by role and level; individual pay is determined based on

multiple factors, including job-related skills, experience, relevant education or training, work

location, and internal equity. The range provides the opportunity for growth and progression as

you develop within the role.

Base pay is one part of our U.S. total compensation package which includes eligibility in the

Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular

employees working 20+ hours a week).

Source: Axcelis on Workday · View original posting (opens in new tab)

Pay in context

This role's base floor ($124,924) is above 16% of the 391 Software Engineering roles in Massachusetts listed on this site. Their median floor is $150,000; the middle half runs from $134,250 to $172,250.

Only jobs on this site count, and each one publishes a base salary of $100,000 or more, so this compares six-figure jobs with each other, not with the whole market. Computed Nov 6, 2026.

This range next to 6 other live Axcelis roles with the nearest advertised base floor
Chart as a table
This range next to 6 other live Axcelis roles with the nearest advertised base floor
RolePublished base
Senior Software Systems Engineer (this listing)$124,924 - $187,387
Senior Technical Project Manager (Electrical Engineering Focus)$124,050 - $186,075
Senior Advanced Control & Automation Engineer- Semiconductor Equipment$124,050 - $186,075
Senior RF Electrical Engineer$124,050 - $186,075
Senior High Voltage Electrical Engineer$124,050 - $186,075
Senior Electrical Engineer$124,050 - $186,075
Sr. Reliability Quality Engineer$122,290 - $183,435

Same $100K to $400K scale as every card. All Axcelis roles · How to read the bar

Observed changes

  1. First observed on the employer's board
  2. Began meeting the published-salary criteria
Observed since
Employer-stated posting date
2026-08-19
Where this pay comes from

Location as the employer wrote it: Beverly, MA

$124,924.40 - $187,386.60

Method
Employer text, read with fixed rules and re-verified
Checked
Rule set
us-base-v2

The pay passage appears in the employer's own job text. Fixed, deterministic rules located it, and the passage below was checked against the stored copy of the posting.

What we verified

  • The pay figures come from the employer's own listing, quoted exactly above.
  • The pay is an annual base salary in US dollars with a minimum of at least $100,000.
  • The role was publicly listed on the employer's job board when last checked.

We do not verify what the employer will actually offer, whether the employer is still recruiting for the role, or anything beyond what the employer published. Full methodology.