Six Figure Work

System Particle Control Hardware Engineer/Scientist – Semiconductor Equipment

Axcelis

Company websiteaxcelis.com (Axcelis, opens in new tab)

Base salary $130,800  to $196,200

Employer-published annual base salary, USD. Advertised base range in Beverly, MA

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  • LocationBeverly, MA
  • WorkplaceWorkplace not stated
  • Status at last checkSource accepting applications when checked
  • Last checked (1 h ago) · observed since

About this job

JOB DESCRIPTION

Our people make all the difference in our success.
 

Axcelis Technologies develops innovative capital equipment for the semiconductor industry. Our Platform Controls team develops control architectures, industrial automation solutions, and advanced control algorithms that enable reliable, high-performance operation of complex subsystems.
 

About the Role

This exciting hands-on role for Particle Control Hardware Engineer/Scientist reporting into Technology Development organization is responsible for designing and developing hardware solutions to minimize particle and contamination on Axcelis implantation systems.

This role focuses on designing, testing and qualifying components within Axcelis tools by applying mechanical engineering, surface engineering, material interaction chemistry and particle transport physics.

The role requires extensively cross-functional collaboration with process engineering, design engineering, equipment engineering and field support teams to identify particle and metal contamination sources, implement corrective actions, and improve tool performance in lab and at customer sites across the world.
 

Key Responsibilities

  • As the lead particle control hardware engineer/scientist Conduct root cause investigations for particle-related yield excursions and defectivity issues with hands on testing and analysis using  advanced metrology systems such as particle counters, SEM/EDX, VPD ICP-MS, optical inspection.

  • Design precision mechanical components for the system specifically in key modules affecting particle performance.

    • Develop materials, coatings, seals, and surface finishes suitable for ultra-clean applications.

    • Perform mechanical analysis to reduce particle generation from wear, friction, vibration, and system interfaces.

    • Utilize PLM, CAD, and FEA tools. Specific knowledge of Windchill, Creo and Ansys.

  • Interface with customers and suppliers regarding contamination specifications and corrective actions.

  • Support audits, customer inquiries, and technical problem-solving activities.

  • Travel internationally as required to support customer upgrades and testing (10-25%).
     

Requirements

  • Master or PhD in Mechanical Engineering, Aerospace Engineering, Materials Engineering, Manufacturing Engineering or equivalent areas.

  • 3-10 years of hardware development experience in semiconductor manufacturing, semiconductor equipment, vacuum systems, or contamination-sensitive industries.

  • Demonstrated hands on working experience operating sophisticated systems similar to semiconductor equipment.

  • Working level understanding of contamination control and particle generation mechanisms.
     

  • Experience with:

    • Cleanroom operations (ISO Class 1-5 preferred)

    • Vacuum system design

    • Precision mechanical assemblies

    • Wafer handling systems

    • Root cause analysis methodologies

    • Statistical process control (SPC)
       

  • Proficiency in CAD software (CREO or similar) and engineering documentation practices.

  • Working experience with statistical analysis techniques and software.

  • Experience working with suppliers on technology development.

  • Able to work in a lab environment and assist with hardware installations.

  • Able to work collaboratively in a fast paced environment.

  • Strong communication and presentation skills.

    Preferred Knowledge:

    • Knowledgeable with graphite, graphite surface  treatments, semiconductor chamber shield design.

    • Knowledgeable in typical particle types in semiconductor systems and mitigation methods.

EQUAL OPPORTUNITY STATEMENT


It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law.  Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
 

U.S. BASE SALARY RANGE

$130,800.00 - $196,200.00

This base salary range reflects the typical compensation for this role across U.S. locations.

Our salary ranges are determined by role and level; individual pay is determined based on

multiple factors, including job-related skills, experience, relevant education or training, work

location, and internal equity. The range provides the opportunity for growth and progression as

you develop within the role.

Base pay is one part of our U.S. total compensation package which includes eligibility in the

Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular

employees working 20+ hours a week).

Source: Axcelis on Workday · View original posting (opens in new tab)

Pay in context

This role's base floor ($130,800) is above 25% of the 310 Science & Research roles in Massachusetts listed on this site; 3 others list the same floor. Their median floor is $159,500; the middle half runs from $129,730 to $190,600.

Only jobs on this site count, and each one publishes a base salary of $100,000 or more, so this compares six-figure jobs with each other, not with the whole market. Computed Nov 7, 2026.

This range next to 6 other live Axcelis roles with the nearest advertised base floor
Chart as a table
This range next to 6 other live Axcelis roles with the nearest advertised base floor
RolePublished base
System Particle Control Hardware Engineer/Scientist – Semiconductor Equipment (this listing)$130,800 - $196,200
Senior Operations Finance Manager$129,598 - $194,397
Principal Systems Engineer, Platform Robotics & Vacuum Architecture$130,880 - $196,320
Mechanical Engineering Manager I$131,592 - $197,389
Optical Systems Engineer$132,073 - $198,109
Senior Software Systems Engineer$124,924 - $187,387
Senior Technical Project Manager (Electrical Engineering Focus)$124,050 - $186,075

Same $100K to $400K scale as every card. All Axcelis roles · How to read the bar

Observed changes

  1. First observed on the employer's board
  2. Began meeting the published-salary criteria
Observed since
Employer-stated posting date
2026-09-15
Where this pay comes from

Location as the employer wrote it: Beverly, MA

$130,800.00 - $196,200.00

Method
Employer text, read with fixed rules and re-verified
Checked
Rule set
us-base-v2

The pay passage appears in the employer's own job text. Fixed, deterministic rules located it, and the passage below was checked against the stored copy of the posting.

What we verified

  • The pay figures come from the employer's own listing, quoted exactly above.
  • The pay is an annual base salary in US dollars with a minimum of at least $100,000.
  • The role was publicly listed on the employer's job board when last checked.

We do not verify what the employer will actually offer, whether the employer is still recruiting for the role, or anything beyond what the employer published. Full methodology.

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